Honeywell Sensing and Control is one of the world's largest single source suppliers
of sensors and switches.
Advantage
Page for:
- Product Manuals
- Product Drawings
- Configurators
- Software
- Latest Catalog
- And More
|
|
Honeywell Sensotec Frequently Asked Questions |
How Does a Silicon-Based Pressure Sensor Work?
Silicon based pressure sensor
A silicon-based pressure sensor measures an applied pressure by detecting
the effect of the pressure against a silicon substrate. Strain gages in
a silicon-based pressure sensor are not bonded to, but etched onto a silicon
substrate. Notice that the silicon substrate is not connected to the diaphragm
via any mechanical transmitter; rather, a transmission fluid (oil) is used
to transmit the pressure from the diaphragm to the silicon substrate.
As an applied pressure pushes against the diaphragm, the transmission fluid
presses against the silicon substrate. As the silicon substrate experiences
deformation, the strain gages, which are etched onto the silicon substrate,
register this change.
As with bonded foil strain gage-based pressure sensors, strain gages in
a silicon-based pressure sensor are arranged in a whetstone bridge circuit
formation. The bridge circuit detects any change in electrical resistance,
which occurs once a strain gage has been bent due to deformation of the
silicon substrate, as a deflection from the initial zero voltage reading.
The deflection means the applied pressure to the sensor has changed.
Sensotec Note:
Sensotec uses bonded foil strain gages, bonded semiconductor strain gages,
gaged silicon substrates, and sputtered technologies in its pressure sensors
depending on which is most suitable for the application.
|
Offline
Download our new FAQ
document for a hardcopy of more than 100 FAQs at your fingertips.
Online
Select a category below, or use the keywords section to explore our
online "experience" database. |
|
