Honeywell Sensotec Products in the Semiconductor Industry

Since 1973, Honeywell Sensotec has been a leading manufacturer of superior quality transducers and instrumentation for a wide range of applications, especially in the semiconductor and electronics industries. Our transducers are manufactured from the highest quality stainless steels on our state-of-the-art CNC machines for unmatched quality, accuracy , and reliability. Honeywell Sensotec is unique in the industry for offering the broadest range of transducers and sensing technologies to meet all of your pressure, force, load, torque, acceleration, vibration, and displacement measurement needs. Our experienced design engineers, using the latest CAD tools, can design a custom transducer if a standard product does not meet your exact requirements.

Honeywell Sensotec offers a complete family of absolute, gauge, and differential pressure transducers covering pressure ranges from 0.1 psi to 200,000 psi. Our miniature and sub-miniature pressure transducers provide high accuracy measurements in a compact light-weight package for easy incorporation into most equipment. Our Ultra-High Purity Family includes the high performance Model UPF, a true flow through design, with zero dead volume. The Models UPT and UPJ offer ±0.1% accuracy, full scale ranges down to 10" H2O, and are virtually unaffected by the Joule-Thomson cooling affect. High quality 316L VAR stainless steel construction and comprehensive cleaning and testing make the Honeywell Sensotec Ultra-High Purity family suitable for the most demanding semiconductor gas distribution applications.

Honeywell Sensotec's load cells are industrially hardened and provide high accuracy load and force measurements from less than a gram to more than 3 million pounds. Our family of rugged and precise miniature and sub-miniature load cells are unmatched in their applicability to harsh environments with very tight clearances. The all-welded stainless steel construction provides consistently accurate performance for CMP and other wafer processing applications while withstanding vibration, shock, and environmental extremes. Our gas cylinder scales can be used in conjunction with pressure transducers to monitor critical high purity gas delivery to the process tools.

Honeywell Sensotec offers both strain gauge and piezoelectric accelerometers to cover a wide range of vibration and shock monitoring applications, with ranges from 5 to 2000 g and frequencies from DC to 60 kHz. Our rugged, highly accurate shear mode accelerometers are unaffected by large temperature gradients or flexure in accelerometer mounting surface. These small, lightweight sensors allow accurate monitoring of the vibration levels on process equipment where positioning is critical such as wafer steppers. They can also be utilized to provide early detection of machinery wear in high cycle operations such as chip packaging, allowing for preventive maintenance.

Honeywell Sensotec Linear Variable Differential Transformer (LVDT) displacement transducers are available in both AC and DC powered versions with full scale ranges from 0.01 to 36 inches. These welded, all stainless steel transducers can operate in temperatures from -60º F to +250º F to meet the environmental requirements of a wide variety of applications. With accuracies to 0.1% and different armature designs, Honeywell Sensotec LVDT's are well suited to the demanding requirements of precision manufacturing and testing operations common in the semiconductor industry.

Honeywell Sensotec manufactures a wide variety of transducer instrumentation including single and multi-channel signal conditioners, analog and digital indicators, and internal and in-line amplifiers. The Model SC provides up to fourteen self-calibrating input channels when used with a transducer equipped with our unique Signature Calibration module. Our portable, battery operated instruments can be combined with a load cell to create a tool for periodic calibration of pull testers or wafer probes. The Model GM Family provides a digital display and analog output for any pressure transducer, load cell, or LVDT to provide a convenient local indicator as well as a high-level signal input to a data acquisition and control system.